SESHA ESH for High Technology, presents the Virtual Symposia bringing all the cutting-edge research and practical ES&H information of our live symposium directly to you. Join the entire global ES&H Semiconductor Community for this unique learning experience. Scheduled in weekly three-hour classes, each symposium session features multiple speakers on a specific topic. May – August 2020
Some things get better with age. Fire safety equipment is not one of these things. Obsolete fire safety equipment is no cause for nostalgia. Blindly believing that one’s rusty fire safety system will be there when you need it, is not a recommended EHS protocol. Check your fire safety systems, and check them frequently. A non-functioning fire safety system is sometimes worse than none at all.
The 42nd Annual International High Technology ESH Symposium & Exposition of the Semiconductor Environmental, Safety & Health Association (SESHA) is an educational and research forum. The meeting includes symposia, posters, special programs and workshops, as well as contributed papers in topical sessions. The 2020 Meeting will run from April 13–17 at the Embassy Suites by Hilton Scottsdale Resort in the heart of beautiful Scottsdale, Arizona.
Eugene Ngai of Chemically Speaking LLC has dedicated his career to the understanding and improvement of chemical safety in high-tech applications. He has over 40 years of Specialty Gas experience in production, laboratory, R&D, engineering and safety positions. He continues to be active in a number of worldwide industry association working groups, CGA G-13 (Silane), NFPA 55 (Industrial and Medical Gases), NFPA 400 (Hazardous Materials), NFPA 318 (Semiconductor Facilities), SEMI EHS, SESHA and UN TC58 SC2 WG7 (Gas Toxicity ISO 10298, Flammability, Oxidizer ISO 10156).
Over the past 4+ years KFPI has been involved in the research, testing, and development of fire safety solutions regarding pyrophoric chemicals hazards. This included many projects regarding the fire detection and fire suppression/protection of energetic materials such as pyrophoric liquid metal organics like TMA (trimethyl aluminum).
Fire safety solutions for high technology processes require something more than average technical proficiency and uncertain fire safety components. KFPI has a keen understanding of the requirements of high-technology manufacturing fire safety. All fire safety solutions and products provided by KFPI, meet or exceed all relevant fire safety codes, including NFPA, SEMI, and FM Global standards.
The ancient Greeks considered fire to be one of the major elements in the universe, in addition to water, earth and air. In their world, fire was a fundamental principle of material existence – One can feel fire, as one can feel earth, water and air. One can also see, smell, and touch it, if one were daring enough. Fire was an element with which to shape the world around.
High purity metalorganic precursors are widely used in semiconductor manufacturing, in the production of integrated circuits and devices. These once exotic chemistries are now a standard part of various doping and deposition processes. Semiconductor-grade metalorganics are highly-refined for use as precursors in silicon and compound semiconductor industry processes.
Fire safety systems designed to protect semiconductor manufacturing equipment typically use flame detectors to alert the presence of a fire in a semiconductor tool. These critical devices are a very important part of a semiconductor equipment fire suppression system. There are many different kinds of flame detectors, and it is important to use the right kind of flame detector, and to have it installed in the right place in the tool. Flame detectors are designed to see the heat signatures that are created by flames. Different fuel sources create different flame signatures. It is important that a fire safety system is designed with a flame detector that can see potential flame signatures fueled by the respective chemistry in a semiconductor process tool.